Palo Alto Tech Entrepreneur Vincent J. Coates Dies at 87

Vincent J. Coates passed away Tuesday evening at his Palo Alto home at the age of 87.

Coates founded Nanometrics, Inc. in 1975. He was awarded more than 20 U.S. patents, and grew Nanometrics into an important metrology and process control company for the worldwide semiconductor industry. The company is a leading provider of advanced process control metrology and inspection systems.

Coates served as the company's Chief Executive Officer from 1975 until 1998 and as Chairman of the Board from 1975 until 2007. He received a lifetime achievement award for his pioneering work in Scanning Electron Microscopy in 1995 from SEMI.

"Vince was a remarkable entrepreneur and true visionary in the industry," commented Bruce Rhine, Chairman. "His pioneering work in metrology and scientific instruments played a key role in the development and production of integrated circuits and other solid state devices. His contributions to the success of Nanometrics and the industry as a whole are innumerable. He is survived by wife Stella, three children and four grandchildren, all of whom are in our thoughts as we say goodbye to a man who will be greatly missed."

Nanometrics is headquartered in Milpitas.

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